MATERIALS SCIENCE & ELECTRONIC ENGINEERING BALTES BRAND FEDDER HIEROLD

Materials Science & ElECTRONIC ENGINEERING

In this topical volume CMOS-MEMS, the combination of the globally established, billion dollar chip mass fabrication technology CMOS with the fascinating and commercially promising new world of MEMS is covered from all angles.

The book introduces readers to this field and takes them from fabrication technologies and material charaterization aspects to the actual applications of CMOS-MEMS - a wide range of miniaturized physical, chemical and biological sensors and RF systems. Vital knowledge on circuit and system integration issues concludes this in-depth treatise, illustrating the advantages of combining CMOS and MEMS in the first place, rather than having a hybrid solution.

Fabrication Technology
O. Brand

Material Characterization
J. O. Paul, P. Ruther

Monolithically Integrated Inertial Sensors
G. K. Fedder, J. Chae, H. Kulah, K. Najafi, T. Denison, J. Kuang, S. Lewis

CMOS-MEMS Acoustic Devices
J. J. Neumann, K. J. Gabriel

RF-CMOS-MEMS
T. Mukherjee, G. K. Fedder

CMOS-based Pressure Sensors
H.-J. Timme

CMOS-based Chemical Sensors
A. Hierlemann

Biometric Capacitive CMOS Fingerprint Sensor Systems
C. Hierold, G. Hribernig, T. Scheiter

CMOS-based Biochemical Sensing Systems
J. Lichtenberg, H. Baltes

CMOS-based Thermal Sensors
T. Akin

Circuit and System Integration
C. Hagleitner, U. Kirstein

 Yes, please send me the following title:

__ copies Baltes, H. et al. (ed.)
CMOS-MEMS
€ 199.-/sFr 294.-
Series price:
€ 169.-/sFr 250.-
ISBN 3-527-31080-0

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